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United States Patent | 3,843,227 |
Kato , et al. | October 22, 1974 |
An optical system for a microscope for inspecting minute unevenness of a surface. Light reflecting members consisting of two pairs of mirrors or prisms are either fixed or movably disposed at the object side of the objective of a microscope having a vertical illumination system. The light illuminating path is nearly symmetrical regarding the optical axis of the objective lens and is dissected into segments which intersect at a predetermined or arbitrary angle to the surface under examination from both sides thereof. The dissected image can be viewed in the same field, and the inspection is carried out with ease but yet with high accuracy.
Inventors: | Kato; Jinichi (Tokyo, JA), Rikukawa; Katsuji (Yokohama, JA) |
Assignee: |
Nippon Kogaku K.K.
(Tokyo,
JA)
|
Appl. No.: | 05/226,546 |
Filed: | February 15, 1972 |
Feb 08, 1969 [JA] | 44-9005 | |||
Current U.S. Class: | 359/387 ; 356/606 |
Current International Class: | G01B 11/30 (20060101); G02b 021/18 () |
Field of Search: | 350/33,25,81,91 356/120,156,209 |
1873149 | August 1932 | Perez |
3062099 | November 1962 | French |
3542482 | November 1970 | Wilks |
3563665 | February 1971 | Takahashi et al. |