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United States Patent | 5,456,561 |
Poduje , et al. | October 10, 1995 |
An alignment station for elements such as semiconductor wafers on a robot arm uses a rotating support and edge detector which in combination are operative to place a wafer on the rotating support, detect wafer alignment, move the wafer to bring it into alignment either on the rotating support itself or onto a separate station.
Application Number | Filing Date | Patent Number | Issue Date | ||
863819 | Apr., 1992 | 5332352 | |||
320276 | Mar., 1989 | 5102280 | Apr., 1992 | ||
Current U.S. Class: | 414/744.5 ; 414/744.6; 414/749.1; 414/800; 901/15; 901/6 |
Current International Class: | B25J 9/04 (20060101); B25J 9/02 (20060101); B25J 9/16 (20060101); B25J 13/08 (20060101); H01L 21/67 (20060101); H01L 21/68 (20060101); B25J 009/06 () |
Field of Search: | 414/225,744.5,744.6,744.8,749,786 901/15,21,6 |
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