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United States Patent | 5,439,554 |
Tamura , et al. | August 8, 1995 |
There is disclosed a method for fabricating a liquid jet recording head having heat acting portions, communicating to orifices for liquid discharge, for applying heat energy to a liquid to form a bubble therein, electricity-heat converters for generating said heat energy, pairs of electrodes, and an upper protective layer, characterized in that the wet etching rate of electrode layer is higher on the upper portion in a direction of film thickness than on the lower portion.
Inventors: | Tamura; Hideo (Nagahama, JP), Murakami; Keiichi (Hachioji, JP) |
Assignee: |
Canon Kabushiki Kaisha
(Tokyo,
JP)
|
Appl. No.: | 08/073,388 |
Filed: | June 9, 1993 |
Jun 10, 1992 [JP] | 4-150667 | |||
Current U.S. Class: | 216/16 ; 216/48; 216/99; 347/58; 347/63 |
Current International Class: | B41J 2/16 (20060101); C23F 1/02 (20060101); B44C 001/22 (); C23F 001/02 () |
Field of Search: | 156/628,633,634,643,655,656,659.1,644 346/1.1,76,14R |
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