A housing having a generally circular cross section with a wafer-receiving
cavity therein and an opening having an inner dimension larger than the
peripheral dimension of the wafer, an inner surface of said cavity which
tapers inwardly from the outer edges thereof generally toward the center
and away from the opening so that only the outermost edges of the wafer
touch the sides of the cavity, a spring having a generally semispherical
shape positioned above the wafer to engage only the edges thereof and a
cover or a similar housing affixed over the opening of the cavity in
sealing engagement in abutting relationship with the central portion of
the spring to hold the wafer relatively immovable.
| Current U.S. Class: |
206/710 ; 206/509; 215/231; 215/6; 220/23.83; 220/4.27 |
| Current International Class: |
H01L 21/673 (20060101); H01L 21/67 (20060101); B65D 85/62 (20060101); B65D 25/10 (20060101); B65d 021/02 (); B65d 081/08 () |
| Field of Search: |
206/1,65F,18,5A 220/42A,4(cursory) 215/10
|