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United States Patent | 3,558,093 |
Bok | January 26, 1971 |
A vacuum memory holding device of the type used as a tray for rigidly supporting a plurality of waferlike objects in a spray-coating chamber. The device includes a top plate having a plurality of apertures as a support for each one of the wafers and a bottom vacuum chamber from which the vacuum is drawn. The vacuum chamber includes a resilient wall which is collapsed as the vacuum is drawn and serves to hold the vacuum independently and rigidly support the waferlike objects during the spray-coating operation without being connected to the vacuum-drawing source.
Inventors: | Bok; Hendrik F. (North Dartmouth, MA) |
Assignee: |
Epec Systems Corporation
(New Bedford,
MA)
|
Appl. No.: | 04/847,526 |
Filed: | July 29, 1969 |
Current U.S. Class: | 248/362 ; 269/21 |
Current International Class: | B05B 13/02 (20060101); B25B 11/00 (20060101); F16m 013/00 () |
Field of Search: | 248/362,363,206 269/21 51/235 |
1062579 | May 1913 | Aylsworth |
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