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United States Patent | 4,890,141 |
Tang , et al. | December 26, 1989 |
A CMOS device wherein the N-channel devices have n+ gates, and the P-channel devices have p+ gates. A TiN local interconnect system is used to connect the two types of gates, as well as providing connections to moat.
Inventors: | Tang; Thomas E. (Dallas, TX), Wei; Che-Chia (Plano, TX), Haken; Roger A. (Richardson, TX), Chapman; Richard A. (Dallas, TX) |
Assignee: |
Texas Instruments Incorporated
(Dallas,
TX)
|
Appl. No.: | 07/214,912 |
Filed: | June 29, 1988 |
Application Number | Filing Date | Patent Number | Issue Date | ||
83933 | Aug., 1987 | ||||
837481 | Mar., 1986 | ||||
729318 | May., 1985 | ||||
Current U.S. Class: | 257/372 ; 257/903; 257/915; 257/E21.59; 257/E21.688; 257/E27.062; 257/E27.081; 257/E27.099; 257/E27.1 |
Current International Class: | H01L 21/768 (20060101); H01L 21/70 (20060101); H01L 27/092 (20060101); H01L 21/8247 (20060101); H01L 27/105 (20060101); H01L 27/085 (20060101); H01L 27/11 (20060101); U01C 021/283 () |
Field of Search: | 357/42,59,23.3,71 |
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