A semiconductor integrated circuit has a semiconductor internal circuit
having a first power supply line and a second power supply line, wiring
layers connected to a plurality of terminals of a first power supply and
each having a predetermined inductance, and wiring layers connected to a
plurality of terminals of a second power supply and each having a smaller
inductance. Each of the former wiring layers has an inductor making a loop
around the internal circuit.
Current U.S. Class: |
257/277 ; 257/531; 257/E21.022; 257/E23.153 |
Current International Class: |
H01L 21/70 (20060101); H01L 31/102 (20060101); H01L 31/101 (20060101); H01L 29/80 (20060101); H01L 27/04 (20060101); G06F 17/50 (20060101); H01L 31/112 (20060101); H01L 29/66 (20060101); H01L 21/822 (20060101); H01L 21/82 (20060101); H01L 27/00 (20060101); H01L 31/109 (20060101); H01L 029/80 (); H01L 031/112 () |
Field of Search: |
257/277,312,531,532,777,778
|